Abstract: This article reports a gallium nitride (GaN)-based switchable bulk acoustic wave (BAW) resonator with low dc switching voltage and through GaN vias. The low switching voltages between “ON” ...
The SAW sensor, fabricated on a 50-μm ST-cut quartz substrate with 200-nm aluminum electrodes, is coupled with a flexible antenna made by patterning copper electrodes on a polyimide substrate.