New data from particle collisions at the Relativistic Heavy Ion Collider (RHIC), an "atom smasher" at the U.S. Department of Energy's (DOE) Brookhaven National Laboratory, reveals how the ...

Abstract: Sputter deposition, also known as physical vapor deposition, or PVD, is a widely used technique for depositing thin metal layers on semiconductor wafers. These layers are used as diffusion ...