Nature28d
Atomic Layer Deposition and Thin Film Technologies
Atomic Layer Deposition (ALD ... films revealed that the substrate type, deposition temperature, and film thickness significantly influence the crystallization process and the resulting optical ...
Semiconductor Engineering2d
Low-Temperature Solid-Liquid Interdiffusion Bonding For High-Density Interconnect Applications
A new technical paper titled “Facilitating Small-Pitch Interconnects with Low-Temperature Solid-Liquid Interdiffusion Bonding ...
AZoM on MSN4mon
Beta-Phase Gallium Oxide Films Using Plasma-Enhanced Atomic Layer Deposition (PEALD) at 200°C
This study presents a novel approach to depositing crystalline β-Gaâ‚‚O₃ films at low temperatures (as low as 200°C) using ...
Lam Research unveils ALTUS Halo for molybdenum atomic layer deposition
Lam Research (LRCX) unveiled ALTUS Halo, an atomic layer deposition tool that harnesses the capabilities of the metal molybdenum in the ...