“In addition, immersion lithography has brought new types of defects such as water bubbles. ” Inspection systems, therefore, need two basic capabilities: the sensitivity to detect pattern profile ...

“The defect detection requirements vary between different substrate types. For example, in silicon wafers, the inspection requirements for epi wafers used at leading-edge nodes have far stricter ...

The competition in 5nm wafer yield and ... namely "smart defect screen and sample technology" and "defect size metrology technology" - can discover various types of tiny yield loss defects in ...

We will then use our virtual process model to identify an example of a mechanism that can cause these types of asymmetric wafer map defects. A 3D process model of a specific metal stack (Cu/TaN/Ta) on ...

SAN FRANCISCO — Metrology giant KLA-Tencor Corp. here today introduced an integrated suite of electron-beam and optical inspection tools aimed at spotting the smallest possible defects on wafers in ...

“The lack of understanding about BO defect stabilization during the development of SHJ technology may be the main reason why the development process was restricted to n-type c-Si ...

"The VeroTherm offers unique single wafer ... reflow quality and addresses challenges associated with reduced bump pitches. YES has demonstrated superior reflow results with no bump cracking ...

Increasing proliferation of loT (Internet of Things) and rising need of wafer fab equipment ... Based on process type, the market is segmented into Inspection and Defect Review, Metrology and ...

The Chinese module maker and the Australian National University utilized phosphorus diffusion gettering and another defect mitigation strategy to improve the quality of n-type wafers. The proposed ...

One high-volume OEM proves that even simple feedback from an AOI system can reduce end-of-line defects by an order of magnitude. Until recently, the use of pre-reflow optical inspection usually ...

"The VeroTherm offers unique single wafer chamber design with flexibility to improve reflow quality and addresses challenges associated with reduced bump pitches. YES has demonstrated superior reflow ...