The conventional approach to depth profiling this sample would be to use 500 eV monatomic Ar + ions. The profile is shown in figure 2 (a).

Figure 2. Comparison of Ta 4f spectra for monatomic Ar+ and argon cluster ion sputter-cleaning of Ta2O5. Figure 2 displays a comparison of Ta 4f spectra from the three surface areas: base, following a ...