Nature26d
Atomic Layer Deposition and Thin Film Technologies
Atomic Layer Deposition (ALD ... films revealed that the substrate type, deposition temperature, and film thickness significantly influence the crystallization process and the resulting optical ...
Nature26d
Atomic Layer Deposition of Silicon Nitride Thin Films
Atomic Layer Deposition (ALD) is a highly controlled ... a hydrogen-free metal-organic precursor and nitrogen plasma at low temperatures (100–300 °C). This approach resulted in films with ...
Semiconductor Engineering1d
Low-Temperature Solid-Liquid Interdiffusion Bonding For High-Density Interconnect Applications
A new technical paper titled “Facilitating Small-Pitch Interconnects with Low-Temperature Solid-Liquid Interdiffusion Bonding ...
Lam Research unveils ALTUS Halo for molybdenum atomic layer deposition
Lam Research (LRCX) unveiled ALTUS Halo, an atomic layer deposition tool that harnesses the capabilities of the metal molybdenum in the ...