The deflection at different frequencies is obtained by simulation. When the micromirror works in quasistatic mode and the driving current is 0.1A, the deflection Angle at 50Hz is 3.5 degrees. When ...

4. Mirror Characterization Over the Full Deflection Angle Range The motorized goniometer modifies the microdevice tilt and tip using the parameters calculated in the preceding stages.

During the flight control system testing (FCST), it is crucial to accurately measure the deflection angles of flight control surfaces to determine whether they respond precisely to commands. However, ...